Journal
ACOUSTICAL PHYSICS
Volume 65, Issue 3, Pages 263-268Publisher
PLEIADES PUBLISHING INC
DOI: 10.1134/S1063771019030072
Keywords
composite acoustic resonator; synthetic diamond; aluminum nitride; scandium-aluminium nitride; bulk acoustic wave; piezoelectric layered structure; Q factor
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Funding
- Russian Science Foundation [16-12-10293]
- Russian Science Foundation [19-12-13039] Funding Source: Russian Science Foundation
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The paper demonstrates for the first time the possibility of using aluminum nitride-scandium as an effective piezoelectric material in composite acoustic resonators on synthetic diamond substrates. Composite resonators based on an Al/(Al, Sc)N/Mo/(100) diamond piezoelectric layered structure with three Sc concentrations have been studied in the frequency range of 0-20 GHz. It is shown that such resonators can be excited in a wide frequency range from 0.2 to 20 GHz with Q factors relatively on par with similar devices using pure aluminum nitride. The quality parameter Qf approximate to 3 x 10(14) Hz in a resonator sample based on the Al/Al0.7Sc0.3N/Mo/(100) diamond structure is comparable to the similar record value for composite resonators on diamond substrates and thin-film piezoelectric AlN transducers. The maximum values of the squared effective electromechanical coupling coefficient for composite BAW resonators increased by almost an order of magnitude upon replacing an AlN with an ASN film.
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