Detection and Discrimination of Volatile Organic Compounds using a Single Film Bulk Acoustic Wave Resonator with Temperature Modulation as a Multiparameter Virtual Sensor Array

This paper describes the detection and discrimination of volatile organic compounds (VOCs) using an e-nose system based on a multiparameter virtual sensor array (VSA), which consists of a single-chip temperature-compensated film bulk acoustic wave resonator (TC-FBAR) coated with 20-bilayer self-assembled poly(sodium 4-styrenesulfonate)/poly(diallyldimethylammonium chloride) thin films. The high-frequency and microscale FBAR multi-parameter VSA was realized by temperature modulation, which can greatly reduce the cost and complexity compared to those of a traditional e-nose system and can allow it to operate at different temperatures. The discrimination effect depends on the synergy of temperature modulation and the sensing material. For proof-of-concept validation purposes, the TC-FBAR was exposed to six different VOC vapors at six different gas partial pressures by real-time VOC static detection and dynamic detection. The resulting frequency shifts and impedance responses were measured at different temperatures and evaluated using principal component analysis and linear discriminant analysis, which revealed that all analytes can be distinguished and classified with more than 97% accuracy. To the best of our knowledge, this report is the first on an FBAR multiparameter VSA based on temperature modulation, and the proposed novel VSA shows great potential as a compact and promising e-nose system integrated in commercial electronic products.