Journal
VACUUM
Volume 163, Issue -, Pages 69-74Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2019.02.006
Keywords
Aluminum-doped zinc oxide; Hydrogen plasma treatment; Resistivity; Transmittance; Spectroscopic ellipsometer; Optical constants
Funding
- National Natural Science Foundation of China [61427815, 61504064, 51502144, 61605089]
- China Postdoctoral Science Foundation [2017M611875]
- NUPTSF [NY218107]
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Aluminum-doped zinc oxide (AZO) thin films were prepared by radio frequency (RF) sputtering at room temperature, and then post-treated by hydrogen (H-2) plasma at different durations. After H-2 plasma treatment under the condition of 10 W, 200 degrees C and 3.0 Hours, the resistivity showed a dramatically decrease from 1.6 Omega cm to 3.4 x 10(-3) Omega cm, while the transmittance at the wavelength of 550 nm was improved from 90.5% to 96.0%. The optical constants of H-2 plasma-treated AZO thin films were detailed characterized by a varied angle spectroscopic ellipsometer. The results show that the refractive index n decreases in the entire measured wavelength range of 350-1100 nm, while the extinction coefficient k decreases in the short wavelength range and changes negligibly at the long wavelength range. These results can provide guidelines for the design and optimization of AZO thin film-based optoelectronic applications.
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