Journal
PLASMA PROCESSES AND POLYMERS
Volume 16, Issue 6, Pages -Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/ppap.201800209
Keywords
computer modeling; hydrocarbons; ion-assisted chemistry; mass spectrometry; nanoparticles
Funding
- Centre National de la Recherche Scientifique [07368]
- Humboldt Foundation
- Ministeres des Affaires Etrangeres et du Developpement International (MAEDI) et de l'Education Nationale de l'Enseignement Superieur et de la Recherche (MENESR) [30790RL]
- [SFB TR24]
- [B13]
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A volume-averaged model and numerical simulations are used to clarify the effects of process conditions on the plasma chemistry and species initiating the formation of nanoparticles in an Ar/C2H2 plasma. It is shown that Ar/C2H2 plasmas with low electron density, moderate input flux of acetylene and an electron energy distribution function (EEDF) close to the Druyvesteyn EEDF are the most suitable for the production of carbonaceous nanoparticles. These results are verified by direct comparison with experimental data and enable to formulate recommendations for future experiments with a controlled growth of nanoparticles in chemically active plasmas.
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