Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 29, Issue 8, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1361-6439/ab23e2
Keywords
nonliniearity; flexural; Duffing; parametric resonance; coupled resonators; phase noise; bifurcation
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This review describes recent experimental developments in the study of nonlinearities for flexural microelectromechanical systems (MEMS) structures. It includes motivation for studying a variety of nonlinear phenomena, highlighting applications where nonlinearities are relevant. Examples are described where nonlinearities are seen as a nuisance, along with techniques used to mitigate the nonlinearities. More recently, efforts to exploit nonlinearities for improved performance have emerged and are also described. After a summary of the theory behind nonlinear mechanisms, the article describes progress in several areas of nonlinearity: engineering nonlinearities to enhance performance, bifurcations and multistability, parametric processes, frequency mixing, nonlinearly coupled resonances, and nonlinear dissipation.
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