☆ 4.8 Article

Area-Selective Deposition of Ruthenium by Combining Atomic Layer Deposition and Selective Etching

CHEMISTRY OF MATERIALS (2019)

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Journal

CHEMISTRY OF MATERIALS
Volume 31, Issue 11, Pages 3878-3882

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acs.chemmater.9b00193

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Categories

Chemistry, Physical Materials Science, Multidisciplinary

Funding

  1. Netherlands Organization for Scientific Research (NWO) through the Zwaartekracht program Research Centre for Integrated Nanophotonics
  2. NASCENT Whaley fellowship
  3. Solliance
  4. Dutch province of Noord-Brabant
  5. National Science Foundation (NSF) Graduate Research Opportunities Worldwide program

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