Journal
APPLIED PHYSICS LETTERS
Volume 114, Issue 13, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.5080344
Keywords
-
Categories
Funding
- Bill & Melinda Gates Foundation
- DARPA
- National Science Foundation
- U.S. Army Research Office
Ask authors/readers for more resources
Controllable nanofabrication is at the very foundation of nano-science and nano-technology. Today, ultrafast laser writing has been broadly adopted for micro-fabrication because of its ability to make precise and rapid processing of almost all types of materials in an ambient environment. However, direct laser writing is typically unsuitable for high-quality 2D nano-patterning. In this work, we introduce a maskless laser nano-lithographic technique that allows us to create regular 2D periodic nanopatterns on glass. Glass is a particularly challenging material since it does not absorb light readily. Our strategy starts with a glass sample being coated with a thin layer of metal, and then irradiated with a series of pulse bursts at progressively increasing fluence levels. This process allows us to sequentially activate a series of tailored physical processes that lead to the formation of regular 2D periodic nanopatterns on glass. The formation mechanism of this nano-patterning is also simulated numerically and further corroborated by a series of control experiments. We also show controllability in forming various shapes and sizes of nanopatterns through tailored fluence doses. Our technique provides a high-speed and low-cost method for glass nanofabrication. Published under license by AIP Publishing.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available