4.8 Article

Multimodal Sensing with a Three-Dimensional Piezoresistive Structure

Journal

ACS NANO
Volume 13, Issue 10, Pages 10972-10979

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acsnano.9b02030

Keywords

tactile sensor; three-dimensional; electronic skin; silicon nanomembrane; electromechanical sensor

Funding

  1. National Natural Science Foundation of China [11722217]
  2. Tsinghua National Laboratory for Information Science and Technology
  3. NSF [CMMI1400169, CMMI1534120, CMMI1635443]
  4. National Research Foundation of Korea (NRF) - Korean government [2019R1C1C1007629]
  5. Ajou University research fund
  6. Basic Science Research Program of the National Research Foundation of Korea (NRF) - Ministry of Education [N01180787]
  7. Competency Development Program for Industry Specialists of the Korean Ministry of Trade, Industry and Energy (MOTIE) [P0002397]
  8. Ministry of Science, ICT and Future Planning [2009-0082580]
  9. National Research Foundation of Korea [2019R1C1C1007629] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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Sensors that reproduce the complex characteristics of cutaneous receptors in the skin have important potential in the context of artificial systems for controlled interactions with the physical environment. Multimodal responses with high sensitivity and wide dynamic range are essential for many such applications. This report introduces a simple, three-dimensional type of microelectromechanical sensor that incorporates monocrystalline silicon nanomembranes as piezoresistive elements in a configuration that enables separate, simultaneous measurements of multiple mechanical stimuli, such as normal force, shear force, and bending, along with temperature. The technology provides high sensitivity measurements with millisecond response times, as supported by quantitative simulations. The fabrication and assembly processes allow scalable production of interconnected arrays of such devices with capabilities in spatiotemporal mapping. Integration with wireless data recording and transmission electronics allows operation with standard consumer devices.

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