Journal
ACS PHOTONICS
Volume 6, Issue 4, Pages 1018-+Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsphotonics.9b00021
Keywords
submicrometer pixel; dielectric nanostructures; color filter; RGB; image sensor
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Funding
- European Union's Horizon 2020 research and innovation programme under the Marie Sklodowska-Curie Grant [675745]
- German Federal Ministry of Education and Research [FKZ 03ZZ0434, FKZ 03Z1H534]
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Digital color imaging relies on spectral filters on top of a pixelated sensor, such as a CMOS image sensor. An important parameter of imaging devices is their resolution, which depends on the size of the pixels. For many applications, a high resolution is desirable, consequently requiring small spectral filters. Dielectric nanostructures, due to their resonant behavior and its tunability, offer the possibility to be assembled into flexible and miniature spectral filters, which could potentially replace conventional pigmented and dye-based color filters. In this paper, we demonstrate the generation of transmissive structural colors based on uniform-height amorphous silicon nanostructures. We optimize the structures for the primary RGB colors and report the construction of submicrometer RGB filter arrays for a pixel size down to 0.5 mu m.
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