4.6 Review

Advances in Capacitive Micromachined Ultrasonic Transducers

Related references

Note: Only part of the references are listed.
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CG Yaralioglu et al.

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Dynamic analysis of capacitive micromachined ultrasonic transducers

B Bayram et al.

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Linear and nonlinear equivalent circuit modeling of CMUTs

A Lohfink et al.

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High-intensity focused ultrasound in the treatment of solid tumours

JE Kennedy

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Low temperature fabrication of immersion capacitive micromachined ultrasonic transducers on silicon and dielectric substrates

J Knight et al.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2004)

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Effect of nanoscale surface roughness on the bonding energy of direct-bonded silicon wafers

N Miki et al.

JOURNAL OF APPLIED PHYSICS (2003)

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Volumetric ultrasound Imaging using 2-D CMUT arrays

O Oralkan et al.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2003)

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Silicon micromachined ultrasonic transducers

BT Khuri-Yakub et al.

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS (2000)