Manufacturing of lens arrays using fast tool servo system based on error correcting algorithm

Fast tool servo (FTS) system can accurately manufacture the optical components with complex surfaces or microstructures. Due to the influences of moving mass and time constant of drive unit, the output displacement of FTS system will produce the amplitude attenuation and the phase delay, and the machining error will obviously increase in the situation. In this paper, the error correcting algorithm of FTS system is designed, the lead step number and the lead gain are reasonably planned in the error correcting procedure, and the simulating results indicate that the algorithm is simple and the output displacement of FTS system is precise. The effectiveness of designed error correcting algorithm is experimentally verified in the machining procedure of lens array by using FTS system, the machined surface is consistent with the expectant shape referring to the measuring result, and the depth error is 0.06 mu m in peak-to-valley value.