Journal
OPTICS EXPRESS
Volume 27, Issue 7, Pages 9536-9549Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.27.009536
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Funding
- Army Research Office [W911NF-09-1-0101, W911NF-15-1-0176]
- National Science Foundation [ECCS1407777]
- National Science Foundation, Research Experiences for Undergraduates Program [DMR-1263182]
- National Science Foundation Graduate Research Fellowship
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Photonic crystal (PhC) nanobeams (NB) patterned on porous silicon (PSi) waveguide substrates are demonstrated for the specific, label-free detection of oligonucleotides. These photonic structures combine the large active sensing area intrinsic to PSi sensors with the high-quality (Q) factor and low-mode volume characteristic of compact resonant silicon-on-insulator (SOI) PhC NB devices. The PSi PhC NB can achieve a Q-factor near 9,000 and has an approximately 40-fold increased active sensing area for molecular attachment, compared to traditional SOI PhC NB sensors. The PSi PhC NB exhibits a resonance shift that is more than one order of magnitude larger than that of a similarly designed SOI PhC NB for the detection of small chemical molecules and 16-base peptide nucleic acids. The design and fabrication of PSi PhC NB sensors are compatible with CMOS processing, sensor arrays, and integration with lab-on-chip systems. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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