Journal
OPTICS EXPRESS
Volume 27, Issue 4, Pages 5353-5367Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.27.005353
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Funding
- Swedish Research Council (Vetenskapsradet) [349-2007-8664, 621-2014-5078]
- Swedish Energy Agency (Energimyndigheten) [42028-1]
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Dielectric metasurfaces based on amorphous silicon (a-Si) nanodisks are interesting for nanophotonic applications due to the high refractive index and mature/low temperature fabrication of a-Si. The investigated metasurfaces consist of a-Si nanodisk arrays embedded in a transparent film. The diameter-dependent optical properties of the nanodisk Mie resonators have been investigated by finite-difference time-domain (FDTD) simulations and spectrally-resolved reflectivity and transmission measurements. Well-ordered substrate-free a-Si nanodisk arrays were fabricated and characterized with regard to their broadband anti-reflection properties when placed on a crystalline silicon (c-Si) surface, and reflectivity/ transmission properties when embedded in a polydimethylsiloxane (PDMS) film. Our results confirm broadband anti-reflection when placed on silicon, while the optical characteristics of the nanodisks embedded in PDMS are shown to be potentially useful for color/NIR filter applications as well as for coloring on the micro/nanoscale. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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