Journal
OPTICS EXPRESS
Volume 27, Issue 4, Pages 3867-3872Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.27.003867
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Funding
- Ministry of Science and Technology, Taiwan [104-2221-E-150-064 -MY3, 107-2221-E-150-023]
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This paper proposes a design for a dielectric-grating-coupled surface plasmon resonance (SPR) sensor that can be fabricated using a low-cost nanoimprint process and exhibits a high phase detection sensitivity when light is incident on the backside of the sensor and does not pass through the analyte on the front-side of the sensor. A low-refractive-index material (mesoporous silica) is utilized to implement a reverse symmetric waveguide structure that can enhance electric-field strength on the sensor surface and improve detection sensitivity. A sol-gel method is used to fill the groove of the grating structure with a highrefractive-index material (titanium dioxide), and surface smoothness is improved via a flat silicon impression mold. The experimental results indicate that although the sensor device exhibits defects and non-smooth surface relief. phase detection sensitivity can still be achieved as high as 2 x 10(-5) RIU by using an electro-optic heterodyne interferometer. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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