Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 91, Issue -, Pages 260-266Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2018.11.027
Keywords
alpha particle irradiation; Diamond film; RGO/Au electrode; Ohmic contact; Raman spectroscopy
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Funding
- Science and Technology Commission of Shanghai [16010500500]
- Instrumental Analysis and Research Center of Shanghai University
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(111)-oriented poly-crystalline diamond films (PCDs) have been deposited on Si substrates by MPCVD technology. The new electrode structure of reduced graphene oxide (RGO)/Au was successfully fabricated onto PCDs. Using the circular transmission line model (CTLM), the contact resistance of 6.6 Omega cm(-2) was obtained for RGO/Au electrode on PCD surface, which was notably lower than that of 97.4 Omega cm(-2) for Ti/Pt/Au electrode. Furthermore, two detectors with these two type electrodes were made respectively. The dark current, photocurrent and energy resolution of these two detectors under 5.5 MeV alpha particles irradiation from a Am-241 source were observed. The results demonstrated that the fabrication of RGO/Au electrode onto PCD can realize a fine ohmic contact. The photocurrent of 58.7 nA for the detector with RGO/Au electrode had higher values than that of 8.8 nA for the detector with Ti/Pt/Au electrode at the bias voltage of 100 V respectively. Due to the realization of good contact on PCD surface with RGO/Au electrode, the energy resolution of 11.9% for the detector with RGO/Au electrode better than that of 24% for the detector with Ti/Pt/Au electrode can be obtained. Fabrication of the RGO/Au electrode on PCD may provide a feasible way to improve its detection performance under alpha particles irradiation.
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