Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 29, Issue 4, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1361-6439/ab035d
Keywords
CMUT; MEMS; ultrasound transducer; mechanical coupling; analytical modeling
Categories
Funding
- Fraunhofer society [832 308]
- ECSEL project 'Advanced Distributed Pilot Line for More-than-Moore Technologies' (ADMONT) [661796]
- Fraunhofer IPMS
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In this paper we present a structural analytical model for a capacitive micromachined ultrasonic transducer (CMUT), based on a sacrificial release fabrication process and comprised of electro-mechanical plate actuators transferring their motion to a coupling roof structure on top. The structure features a larger average displacement compared to conventional designs at lower operational frequencies. Low operational frequencies in the range of 40 kHz-1 MHz are beneficial for airborne applications due to their frequency-dependent strong wave attenuation in air, limiting the signal-to-noise ratio. The eigenfrequency dependence on the roof mass is calculated analytically and lumped elements, which can be used in equivalent circuits, are extracted. In addition, finite element analyses utilizing a shell-beam model are conducted. Experimental results, based on digital holographic microscopy, reveal the usability of the deduced model within an uncertainty of 8%. The developed dimensionless form of the analytical model can be used for future design purposes.
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