Journal
ACS APPLIED MATERIALS & INTERFACES
Volume 11, Issue 6, Pages 5668-5674Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsami.8b19689
Keywords
3D microbattery; solid-state polymer electrolyte; initiated chemical vapor deposition; copolymer; thin film
Funding
- NSF Center for Hierarchical Manufacturing [CMMI-1025020]
- U.S Army Research Laboratories [ARL W91 INF-15-2-0026]
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Reliable integration of thin film solid-state polymer electrolytes (SPEs) with 3D electrodes is one major challenge in microbattery fabrication. We used initiated chemical vapor deposition (iCVD) to produce a series of nanoscale copolymer films comprising hydroxyethyl methacrylate and ethylene glycol diacrylate. Conformal copolymer coatings were applied to a variety of patterned 3D electrodes and subsequently converted into ionic conductors by lithium salt doping. Broad tunability in ionic conductivity was achieved by optimizing the copolymer cross-linking density and matrix polarity, resulting in a room-temperature conductivity of (6.1 +/- 2.7) x 10(-6) S cm(-1), the highest value reported fo conformal, nanoscale SPEs.
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