4.8 Article

Fabrication of Conductive 3D Gold-Containing Microstructures via Direct Laser Writing

Journal

ADVANCED MATERIALS
Volume 28, Issue 18, Pages 3592-+

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201506126

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Funding

  1. Karlsruhe Institute of Technology (KIT) via the Helmholtz association (STN program)
  2. German Research Council (DFG)
  3. Alexander von Humboldt Foundation
  4. Karlsruhe Nano Micro Facility (KNMF), a Helmholtz Research Infrastructure at Karlsruhe Institute of Technology (KIT)

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3D conductive microstructures containing gold are fabricated by simultaneous photopolymerization and photoreduction via direct laser writing. The photoresist employed consists of water-soluble polymers and a gold precursor. The fabricated microstructures show good conductivity and are successfully employed for 3D connections between gold pads.

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