High-Speed Surface Structuring of Polycarbonate Using Direct Laser Interference Patterning: Toward 1 m2 min-1 Fabrication Speed Barrier

Periodic structures with micro-or sub-micrometer resolution can be used to improve the mechanical, biological, or optical properties of surfaces. Direct laser interference patterning combines high resolution ( sub-micrometer feature sizes) with high fabrication speed. New processing heads for highspeed laser interference patterning of polycarbonate are introduced, which provide effective patterning speeds up to 0.9 m(2) min(-1). The surface topography of the processed polymer is analyzed by confocal microscopy and scanning electron microscopy. Focused ion beam is used to create cross-sections to determine the structuring mechanism. Finally, high-speed interference patterning is compared to conventional direct laser writing.