Journal
APPLIED PHYSICS REVIEWS
Volume 5, Issue 4, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.5027850
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Funding
- National Defense Science and Engineering Graduate (NDSEG) Fellowship
- E.K. Potter Stanford Graduate Fellowship
- Swiss National Science Foundation (SNF) [PP00P2-170590]
- National Science Foundation (NSF) as part of the National Nanotechnology Coordinated Infrastructure [ECCS-1542152]
- Defense Advanced Research Projects Agency Precise Robust Inertial Guidance for Munitions (PRIGM) Program
- NSF [CMMI-1662464]
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Quality factor (Q) is an important property of micro- and nano-electromechanical (MEM/NEM) resonators that underlie timing references, frequency sources, atomic force microscopes, gyroscopes, and mass sensors. Various methods have been utilized to tune the effective quality factor of MEM/NEM resonators, including external proportional feedback control, optical pumping, mechanical pumping, thermal-piezoresistive pumping, and parametric pumping. This work reviews these mechanisms and compares the effective Q tuning using a position-proportional and a velocity-proportional force expression. We further clarify the relationship between the mechanical Q, the effective Q, and the thermomechanical noise of a resonator. We finally show that parametric pumping and thermal-piezoresistive pumping enhance the effective Q of a micromechanical resonator by experimentally studying the thermomechanical noise spectrum of a device subjected to both techniques. (C) 2018 Author(s).
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