Journal
MICROMACHINES
Volume 9, Issue 12, Pages -Publisher
MDPI
DOI: 10.3390/mi9120611
Keywords
InP(100) single crystal; Pop-in; nanoindentation; transmission electron microscopy; fracture toughness
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Funding
- Ministry of Science and Technology, Taiwan [MOST 106-2112-M009-013-MY3, MOST 103-2112-M-009-015-MY3, MOST 107-2112-M-214-001, MOST 106-2112-M-214-001, MOST 105-2112-M-214-001]
- Fujian Nature foundation [2016J01039]
- Xiamen City Project [3502Z20173037]
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The indentation-induced deformation mechanisms in InP(100) single crystals were investigated by using nanoindentation and cross-sectional transmission electron microscopy (XTEM) techniques. The results indicated that there were multiple pop-in events randomly distributed in the loading curves, which were conceived to arise primarily from the dislocation nucleation and propagation activities. An energetic estimation on the number of nanoindentation-induced dislocations associated with pop-in effects is discussed. Furthermore, the fracture patterns were performed by Vickers indentation. The fracture toughness and the fracture energy of InP(100) single crystals were calculated to be around 1.2 MPam(1/2) and 14.1 J/m(2), respectively.
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