Journal
MATERIALS
Volume 11, Issue 12, Pages -Publisher
MDPI
DOI: 10.3390/ma11122480
Keywords
AZO; PLD; TFT; transparency; source/drain electrodes
Categories
Funding
- National Natural Science Foundation of China [51771074, 51521002, U1601651]
- National Key Basic Research and Development Program of China (973 program) [2015CB655004]
- Guangdong Natural Science Foundation [2016A030313459, 2017A030310028]
- Guangdong Science and Technology Project [2016B090907001, 2016A040403037, 2016B090906002, 2017B090907016, 2017A050503002]
- Guangzhou Science and Technology Project [201804020033]
- Project for Guangdong Province Universities and Colleges Pearl River Scholar Funded Scheme
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Aluminum-doped ZnO (AZO) has huge prospects in the field of conductive electrodes, due to its low price, high transparency, and pro-environment. However, enhancing the conductivity of AZO and realizing ohmic contact between the semiconductor and AZO source/drain (S/D) electrodes without thermal annealing remains a challenge. Here, an approach called pulsed laser deposition (PLD) is reported to improve the comprehensive quality of AZO films due to the high energy of the laser and non-existence of the ion damage. The 80-nm-thick AZO S/D electrodes show remarkable optical properties (transparency: 90.43%, optical band gap: 3.42 eV), good electrical properties (resistivity: 16 x 10(-4) Omega.cm, hall mobility: 3.47 cm(2)/V.s, carrier concentration: 9.77 x 10(20) cm(-3)), and superior surface roughness (R-q = 1.15 nm with scanning area of 5 x 5 mu m(2)). More significantly, their corresponding thin film transistor (TFT) with low contact resistance (R-SD = 0.3 M Omega) exhibits excellent performance with a saturation mobility (mu(sat)) of 8.59 cm(2)/V.s, an I-on/I-off ratio of 4.13 x 10(6), a subthreshold swing (SS) of 0.435 V/decade, as well as good stability under PBS/NBS. Furthermore, the average transparency of the unpatterned multi-films composing this transparent TFT can reach 78.5%. The fabrication of this TFT can be suitably transferred to transparent arrays or flexible substrates, which is in line with the trend of display development.
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