Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 27, Issue 6, Pages 1204-1212Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2018.2876384
Keywords
Piezoelectric ultrasonic transducers; PMUT; MEMS; microfabrication; process variation; frequency; variability; ranging measurements
Categories
Funding
- Natural Sciences and Engineering Research Council of Canada (NSERC)
- Quebec Fund for Research in Nature and Technology (FRQNT)
- CMC Microsystems
- Microsystems Strategic Alliance of Quebec (ReSMiQ)
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This paper presents a novel architecture for piezoelectric micromachined ultrasonic transducers (PMUT) allowing for a drastic reduction in the impact of process variations on the accuracy of the resonant frequency. At the core of this new topology is a toroidal anchoring technique. Measurement results show that inter-and intra-die resonant frequency standard variations can be reduced from 101 kHz to 23 kHz and from 20 kHz to 5.9 kHz, respectively, by using the method proposed in this paper, showcasing devices fabricated using the PiezoMUMPs commercial fabrication technology. From the 16 chips that have been fabricated, each holding 12 PMUT devices of two different topologies, resonant frequency results are presented and analyzed to assess the effectiveness of the proposed approach. In addition, as a proof of concept, the fabricated PMUT are demonstrated to perform distance ranging measurements.
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