4.7 Article

Dual-Cavity Fabry-Perot Interferometric Sensors for the Simultaneous Measurement of High Temperature and High Pressure

Journal

IEEE SENSORS JOURNAL
Volume 18, Issue 24, Pages 10028-10033

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2018.2875435

Keywords

Fiber optic sensors; Fabry-Perot; femtosecond laser fabrication; temperature measurement; pressure measurement

Funding

  1. National Key R&D Program of China [2018YFB1107200]
  2. 863 Program of China [2015AA043504]
  3. Chinese National Natural Science Foundation [61575021, 61775020]

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A fiber-optic hybrid sensor based on dual-cavity Fabry-Perot interferometers is proposed and demonstrated for the simultaneous measurement of high temperature and high pressure. The proposed sensor is fabricated by fusion splicing of two single-mode fibers (SMFs), a hollow core fiber (HCF), and a cureless fiber (CF), forming a four-section structure of leading SMF-SMF-HCF-CF. A micro-hole is fabricated at the end of the leading SMF using a femtosecond laser, forming an air gap between two SMFs. The CF is thinned and roughened by the femtosecond laser to form a diaphragm. The SMF-based cavity is used as the temperature sensor and the HCF-based cavity as the pressure sensor. Lengths of two cavities are interrogated simultaneously by using the fast Fourier transform-based white-light interferometry. Experimental results show that the proposed sensor exhibits a temperature sensitivity of 19.8 nm/degrees C and a pressure sensitivity of similar to 98 nm/MPa, within the temperature range of 20 degrees C-800 degrees C and the pressure range of 0-10 MPa. The maximum measurement errors of temperature and pressure are 5 degrees C and 0.2 MPa, respectively. As far as we know, it is the first time to detect the temperature of 800 degrees C and the pressure of 10 MPa simultaneously.

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