Journal
CERAMICS INTERNATIONAL
Volume 45, Issue 5, Pages 6190-6197Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2018.12.096
Keywords
Ga-doped ZnO; RTA; CO2 laser annealing
Categories
Funding
- MSIT (Ministry of Science and ICT), Korea, under the ITRC (Information Technology Research Center, Korea) support program [IITP-2018-2018-0-01799]
- Human Resources Development of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant - Korea Government Ministry of Trade, Industry and Energy [20184030202070]
Ask authors/readers for more resources
Ga-doped ZnO (GZO) thin films were prepared for transparent conducting oxide (TCO) applications. For the first time, Ga was successfully employed as an n-type dopant in ZnO materials. For the ionization process of the Ga dopant, an optical annealing process with a high energy was employed. The optimized contents of Ga dopants were tested and analyzed for the TCO applications. Additionally, different types of optical annealing processes were employed and tested for device applications. Before the optical annealing process, furnace annealing was performed as a basic process, and then rapid thermal annealing (RTA) or CO2 laser annealing processes were performed alternately or sequentially. In our experiment, we found that the sequence of the optical annealing process was important for the effectiveness of the annealing owing to the differences in the penetration depth of the wave and the applied energy density. We confirmed that a specific sequential combination of the RTA process and the CO2 laser annealing process can yield high-quality transparent conducing oxide thin films. GZO thin films post annealed using a sequential RTA and CO2 laser annealing methods exhibited the lowest conductance and transmittance values. Also, by introduction of Ga dopant, thin film can obtain high thermal and chemical stability due to its low reactivity and strong resistance to oxidation.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available