4.8 Article

Ultrahigh-mobility graphene devices from chemical vapor deposition on reusable copper

Journal

SCIENCE ADVANCES
Volume 1, Issue 6, Pages -

Publisher

AMER ASSOC ADVANCEMENT SCIENCE
DOI: 10.1126/sciadv.1500222

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Funding

  1. Helmholtz Nanoelectronic Facility (HNF)
  2. Deutsche Forschungsgemeinschaft (DFG) [SPP-1459]
  3. ERC [280140]
  4. EU [NECT-ICT-604391]

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Graphene research has prospered impressively in the past few years, and promising applications such as highfrequency transistors, magnetic field sensors, and flexible optoelectronics are just waiting for a scalable and costefficient fabrication technology to produce high-mobility graphene. Although significant progress has been made in chemical vapor deposition (CVD) and epitaxial growth of graphene, the carrier mobility obtained with these techniques is still significantly lower than what is achieved using exfoliated graphene. We show that the quality of CVD-grown graphene depends critically on the used transfer process, and we report on an advanced transfer technique that allows both reusing the copper substrate of the CVD growth and making devices with mobilities as high as 350,000 cm(2) V-1 s(-1), thus rivaling exfoliated graphene.

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