Journal
MICROSCOPY
Volume 64, Issue 3, Pages 151-158Publisher
OXFORD UNIV PRESS
DOI: 10.1093/jmicro/dfv001
Keywords
monochromator; Wien filter; aberration corrector; high-resolution EELS; high-resolution STEM; atomic-resolution EELS mapping
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In this article, we report the development of a new 200-kV analytical electron microscope equipped with a monochromator with an integrated double Wien-filter system. It enables us to study the electronic structures of materials in detail using electron energy-loss spectroscopy (EELS) analysis at an atomic scale. A highly monochromated and isotropically round electron probe is produced on the specimen plane. The ultimate energy resolutions with 0.1-s acquisition times are measured to be 36 meV at 200 kV and 30 meV at 60 kV. In an EELS mapping experiment performed on SrTiO3 with a monochromated electron probe whose energy resolution is 146 meV, an elemental map exhibits atomic resolution.
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