Journal
MICROSCOPY
Volume 64, Issue 3, Pages 213-217Publisher
OXFORD UNIV PRESS
DOI: 10.1093/jmicro/dfv014
Keywords
Sub-50 pm resolution; aberration correction; cold field emission gun; scanning transmission electron microscope; high-angle annular dark field image
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Funding
- Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program)
- Grants-in-Aid for Scientific Research [25106003] Funding Source: KAKEN
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Si-Si atomic columns separated by 45 pm were successfully resolved with a 300-kV aberration-corrected scanning transmission electron microscope (STEM) equipped with a cold-field emission gun. Using a sufficiently small Gaussian effective source size and a 0.4-eV energy spread at 300 kV, the focused electron probe on the specimen was simulated to be sub-50 pm. Image simulation showed that the present probe condition was sufficient to resolve 45 pm Si-Si dumbbells. A silicon crystalline specimen was observed from the [114] direction with a high-angle annular dark field STEM and the intensity profile showed 45 pm separation. A spot corresponding to (45 pm)(-1) was confirmed in the power spectrum of the Fourier transform.
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