OPTIMIZATION AND INTEGRATION OF MAGNETORESISTIVE SENSORS

This paper addresses challenging issues related to the integration of magnetoresistive (MR) sensors in applications such as magnetic field mapping, magnetic bead detection in microfluidic channels, or biochips. Although sharing the same technological principle for detection (magnetoresistance effect), each application has unique specifications in terms of noise, sensitivity, spatial resolution, electrical robustness or geometric constraints. These differences are of high impact for manufacturing, because some strategies used for sensor optimization compromise the freedom for device architecture.