Fine-tuning control on CNT diameter distribution, length and density using thermal CVD growth at atmospheric pressure: an in-depth analysis on the role of flow rate and flow duration of acetylene (C2H2) gas

An optimization control has been demonstrated to obtain carbon nanotubes having specific diameter distribution, length, homogeneity, and yield during its growth by thermal chemical vapor deposition technique under atmospheric pressure. Carbon nanotubes (CNTs) were grown on silicon wafer where a predeposition of iron catalyst of 2 nm thickness was made by sputtering. The growth was conducted under two variable parameters, i.e., flow rate and flow duration. Argon and hydrogen mixture was used for pretreatment of catalyst and as etching gas, and acetylene as a carbon precursor. In-depth analysis shows that increase in flow rate from 10 to 50 sccm resulted in increase in the concentration of amorphous carbon, CNTs diameter range and decrease in length, we found best result at 20 sccm flow rate of acetylene gas. On the other hand, as we varied flow duration from 6 to 14 min, with keeping flow rate of acetylene 20 sccm constant, dense homogeneous growth of horizontal CNTs network plus an increase in length and diameter range were observed. An optimization of flow rate and flow duration is presented here to obtain a selective diameter distribution and length as expected by this growth technique. Atomic force microscopy, field emission scanning electron microscopy and Raman spectroscopy were used to investigate the samples' morphologies in support of the observations made.