Microvalves and Micropumps for BioMEMS

This review presents an extensive overview of a large number of microvalve and micropump designs with great variability in performance and operation. The performance of a given design varies greatly depending on the particular assembly procedure and there is no standardized performance test against which all microvalves and micropumps can be compared. We present the designs with a historical perspective and provide insight into their advantages and limitations for biomedical uses.