Journal
JOURNAL OF MATERIALS CHEMISTRY C
Volume 1, Issue 46, Pages 7692-7694Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/c3tc31041h
Keywords
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Funding
- EU (HINTS project)
- EU (ERC Advanced Grant SPINMOL)
- Spanish MINECO (Project Consolider-Ingenio in Molecular Nanoscience) [CSD2007-00010, MAT2007-61584, MAT2011-22785]
- FEDER
- Generalidad Valenciana
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It is demonstrated how local oxidation nanolithography performed with an atomic force microscope (AFM-LON) may be successfully employed for the nanopatterning of insulating regions of Ta2O5 on TaS2 ultrathin metallic layers. This provides a simple approach for the fabrication of electronic devices, such as single-electron transistors, at the nanoscale.
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