Journal
IEEE JOURNAL OF PHOTOVOLTAICS
Volume 2, Issue 2, Pages 88-93Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JPHOTOV.2011.2179415
Keywords
Bilayer; low-pressure chemical vapor deposition (LPCVD); micromorph; zinc oxide
Funding
- Swiss Federal Office of Energy [101191]
- European Union Seventh Framework Programme under PEPPER Project [249782]
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ZnO bilayer films were deposited by low-pressure chemical vapor deposition in a single process step by controlling the differential doping of the nucleation and bulk parts of the layers. The resulting 2-mu m-thick films are characterized by low free-carrier absorption and electron mobility over 40 cm(2)/Vs. They, therefore, combine high transparency in the infrared region and moderate sheet resistance that can be lowered below 20 Omega/sq. These properties make ZnO bilayers ideal candidates as electrodes for the development of micromorph thin-film solar cells with enhanced photogenerated current. The potential of such bilayer front electrodes for a further power improvement and cost reduction of industrial micromorph tandem modules is currently investigated at Oerlikon Solar. The first experiments already show a promising gain in the bottom mu c-Si:H cell photogenerated current compared with the current generated with modules deposited on standard uniformly doped ZnO single-layer front contacts.
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