4.7 Review

Nanoimprint Lithography: A Processing Technique for Nanofabrication Advancement

Related references

Note: Only part of the references are listed.
Article Chemistry, Physical

Replication of mold for UV-nanoimprint lithography using AAO membrane

Weimin Zhou et al.

APPLIED SURFACE SCIENCE (2009)

Article Nanoscience & Nanotechnology

The construction of Si2Sb2Te5 electrical probe storage based on UV nanoimprint lithography

Yanbo Liu et al.

NANOTECHNOLOGY (2009)

Article Engineering, Electrical & Electronic

Large area nanosize array stamp for UV-based nanoimprint lithography fabricated by size reduction process

Xiaoli Li et al.

MICROELECTRONIC ENGINEERING (2009)

Article Engineering, Electrical & Electronic

Porous alumina nano-membranes: Soft replica molding for large area UV-nanoimprint lithography

Weimin Zhou et al.

MICROELECTRONIC ENGINEERING (2009)

Article Chemistry, Physical

Characterization of anti-adhesive self-assembled monolayer for nanoimprint lithography

Weimin Zhou et al.

APPLIED SURFACE SCIENCE (2008)

Review Chemistry, Multidisciplinary

Nanoimprint lithography: Methods and material requirements

L. Jay Guo

ADVANCED MATERIALS (2007)

Article Nanoscience & Nanotechnology

Fabrication of photonic crystal structures on light emitting diodes by nanoimprint lithography

Sang Hoon Kim et al.

NANOTECHNOLOGY (2007)

Article Engineering, Manufacturing

Novel process to improve defect problems for thermal nanoimprint lithography

Hyung Seok Park et al.

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING (2007)

Article Chemistry, Physical

Materials for step and flash imprint lithography (S-FIL (R))

Brian K. Long et al.

JOURNAL OF MATERIALS CHEMISTRY (2007)

Article Engineering, Electrical & Electronic

Fabrication of Ge2Sb2Te5 based PRAM device at 60 nm scale by using UV nanoimprint lithography

Heon Lee et al.

MICROELECTRONIC ENGINEERING (2007)

Article Chemistry, Multidisciplinary

Sub-20-nm alignment in nanoimprint lithography using Moire fringe

Nianhua Li et al.

NANO LETTERS (2006)

Article Chemistry, Multidisciplinary

Charge transport and photocurrent generation in poly (3-hexylthiophene): Methanofullerene bulk-heterojunction solar cells

VD Mihailetchi et al.

ADVANCED FUNCTIONAL MATERIALS (2006)

Article Engineering, Electrical & Electronic

Defect control in nanoimprint lithography

L Chen et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2005)

Article Materials Science, Multidisciplinary

One-kilobit cross-bar molecular memory circuits at 30-nm half-pitch fabricated by nanoimprint lithography

W Wu et al.

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING (2005)

Article Chemistry, Multidisciplinary

Polymer imprint lithography with molecular-scale resolution

F Hua et al.

NANO LETTERS (2004)

Article Engineering, Electrical & Electronic

Vinyl ethers in ultraviolet curable formulations for step and flash imprint lithography

EK Kim et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2004)

Article Polymer Science

Application of nano-imprint lithography

Y Hirai et al.

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY (2002)