Journal
SCIENTIFIC REPORTS
Volume 7, Issue -, Pages -Publisher
NATURE PUBLISHING GROUP
DOI: 10.1038/s41598-017-17846-5
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Funding
- German Research Foundation (DFG) [SFB-TR 87]
- VINN Excellence Center Functional Nanoscale Materials (FunMat-2) Grant [2016-05156]
- Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkping University [SFO-Mat-LiU 2009-00971]
- Knut and Alice Wallenberg Foundation [2011.0143]
- Aforsk Foundation [16-359]
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We report on a thin film synthesis technique which allows for unprecedented control over the crystalline phase formation in metastable transition metal nitride based layers. For the model material system of V0.26Al0.74N, a complete transition from hexagonal to supersaturated cubic structure is achieved by tuning the incident energy, hence subplantation depth, of Al+ metal ions during reactive hybrid high power impulse magnetron sputtering of Al target and direct current magnetron sputtering of V target in Ar/N-2 gas mixture. These findings enable the phase selective synthesis of novel metastable materials that combine excellent mechanical properties, thermal stability, and oxidation resistance.
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