4.6 Article

Chemical vapor deposition of diamond on silicon substrates coated with adamantane in glycol chemical solutions

Journal

RSC ADVANCES
Volume 3, Issue 5, Pages 1514-1518

Publisher

ROYAL SOC CHEMISTRY
DOI: 10.1039/c2ra22486k

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Funding

  1. National Science Council of the Republic of China, Taiwan [98-2221-E-009-042-MY3]

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Diamonds were synthesized on adamantane-coated mirror-polished Si (100) substrates by microwave plasma chemical vapor deposition (MPCVD) using a gas mixture of H-2 and CH4. Before MPCVD deposition, Si substrates were dip-coated in chemical solutions of ethylene glycol and diethylene glycol with adamantane. With the coating of adamantane, the diamond nucleation can be enhanced with a density over 1 x 10(8) cm(-2) and the deposited diamond films are shown to be of good crystallinity by scanning electron microscopy and Raman spectrometry. The study demonstrates a simple and efficient way of diamond deposition on a smooth Si substrate.

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