Journal
MATERIALS
Volume 6, Issue 8, Pages 3160-3170Publisher
MDPI
DOI: 10.3390/ma6083160
Keywords
carbon nanotubes; defects; disorder; local synthesis; scanning transmission electron microscopy
Categories
Funding
- Research Council of Norway [197411/V30, 190086/S10]
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Local synthesis and direct integration of carbon nanotubes (CNTs) into microsystems is a promising method for producing CNT-based devices in a single step, low-cost, and wafer-level, CMOS/MEMS-compatible process. In this report, the structure of the locally grown CNTs are studied by transmission imaging in scanning electron microscopy-S(T)EM. The characterization is performed directly on the microsystem, without any post-synthesis processing required. The results show an effect of temperature on the structure of CNTs: high temperature favors thin and regular structures, whereas low temperature favors bamboo-like structures.
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