Journal
MATERIALS
Volume 3, Issue 1, Pages 536-562Publisher
MDPI
DOI: 10.3390/ma3010536
Keywords
porosity; dielectric; interconnect; microelectronic; integrated circuit; semiconductor
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Porous insulators are utilized in the wiring structure of microelectronic devices as a means of reducing, through low dielectric permittivity, power consumption and signal delay in integrated circuits. They are typically based on low density modifications of amorphous SiO2 known as SiCOH or carbon-doped oxides, in which free volume is created through the removal of labile organic phases. Porous dielectrics pose a number of technological challenges related to chemical and mechanical stability, particularly in regard to semiconductor processing methods. This review discusses porous dielectric film preparation techniques, key issues encountered, and mitigation strategies.
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