Related references
Note: Only part of the references are listed.A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage
Xiaoyang Zhang et al.
SENSORS AND ACTUATORS A-PHYSICAL (2015)
MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan
Lin Liu et al.
SENSORS AND ACTUATORS A-PHYSICAL (2014)
Fabrication of robust electrothermal MEMS devices using aluminum-tungsten bimorphs and polyimide thermal isolation
Sagnik Pal et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2012)
A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift
Yiping Zhu et al.
SENSORS AND ACTUATORS A-PHYSICAL (2011)
A Millimeter-Tunable-Range Microlens for Endoscopic Biomedical Imaging Applications
Lei Wu et al.
IEEE JOURNAL OF QUANTUM ELECTRONICS (2010)
3D In Vivo optical coherence tomography based on a low-voltage, large-scan-range 2D MEMS mirror
Jingjing Sun et al.
OPTICS EXPRESS (2010)
Mechanical-Thermal Noise in Drive-Mode of a Silicon Micro-Gyroscope
Bo Yang et al.
SENSORS (2009)
An electrothermomechanical lumped element model of an electrothermal bimorph actuator
Shane T. Todd et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2008)
Tungsten-Based SOI Microhotplates for Smart Gas Sensors
Syed Z. Ali et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2008)
A large vertical displacement electrothermal bimorph microactuator with very small lateral shift
Lei Wu et al.
SENSORS AND ACTUATORS A-PHYSICAL (2008)
A two-axis electrothermal micromirror for endoscopic optical coherence tomography
A Jain et al.
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS (2004)
Rapid-scanning forward-imaging miniature endoscope for real-time optical coherence tomography
XM Liu et al.
OPTICS LETTERS (2004)
Induced-strain multimorphs for microscale sensory actuation design
E Garcia et al.
SMART MATERIALS AND STRUCTURES (2004)
A design methodology for a bulk-micromachined two-dimensional electrostatic torsion micromirror
ZL Hao et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2003)
Share Paper
