Journal
FRONTIERS OF PHYSICS IN CHINA
Volume 4, Issue 2, Pages 205-208Publisher
HIGHER EDUCATION PRESS
DOI: 10.1007/s11467-009-0019-5
Keywords
inertial sensor; accelerometer; capacitive position sensor
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Funding
- National Natural Science Foundation of China [10675047]
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Low noise position measurement is fundamental for space inertial sensors, and at present the capacitive position sensor is widely employed for space inertial sensors. The design for the possible suppression of the front-end electric noises for a capacitive sensor is presented. A prototype capacitive sensor with 2 x 10(-6)pF/Hz(1/2) at frequency above 0.04 Hz is achieved and further improvements are discussed.
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