Journal
VACUUM
Volume 99, Issue -, Pages 68-75Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2013.04.019
Keywords
Ion implantation; Tungsten; TiN coating; Tribological property
Funding
- National Natural Science Foundation of China [51275494, 51005218]
- Fundamental Research Funds for the Central Universities [2012ZY51]
- Program for Key International Science and Technology Cooperation Project of China [2010DFR50070]
- Tribology Science Fund of State Key Laboratory of Tribology [SKLTKF11B04]
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In order to further enhance the tribological properties of TiN coatings used on mechanical parts, W ion implantation with Metal Vapor Vacuum Arc (MEVVA) source was carried out on PVD TiN coatings at the implantation dose as high as 9 x 10(17) ions/cm(2). The microstructures of the TiN coatings were investigated by Scanning Auger microprobe (SAM), X-ray diffraction (XRD), and X-ray photoelectron spectroscope (XPS). The surface morphology and Nano-hardness were examined by an optical profilometer and Nano Indenter System, respectively. Also, the tribological properties were investigated on a ball-on-disc friction and wear tester. The results demonstrated that TiN coating with W-implantation at 9 x 10(17) ions/cm(2) showed remarkably sputtering effects on the surfaces, and sharply decreased the friction coefficient and wear rate by 63.74% and 56.55% respectively. Based on the hard phases of TiN, Ti2N and WN, the existence of soft tungsten, lubricious tungsten oxides and titanium oxides resulted in the remarkable reducing of the friction coefficient of TiN coatings with W-implantation. (c) 2013 Elsevier Ltd. All rights reserved.
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