Journal
VACUUM
Volume 86, Issue 6, Pages 599-602Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2011.07.025
Keywords
Nanocrystalline diamond; Phosgene; Surface conductivity; Gas sensor; SEM
Funding
- Institute of Physics [IAAX00100902, KAN400100701, KAN400480701, SGS10/125/OHK1/2T/11]
- Fellowship J. E. Purkyne
- Grant Agency of ASCR
- [LC510]
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Nanocrystalline diamond (NCD) film was used as a functional part of gas sensor. The gas sensing properties of H-terminated nanocrystalline diamond films were examined to oxidizing gases (i.e., COCl2 and humid air). Pronounced increase in the surface conductivity (3 orders of magnitude) was found after sensor exposure to phosgene gas and was explained by the surface transfer doping effect. We also present a possible way how to achieve sensor selectivity, i.e. how to distinguish between phosgene and humid air (the mostly present background gas in a common environment). (C) 2011 Elsevier Ltd. All rights reserved.
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