Journal
VACUUM
Volume 84, Issue 8, Pages 1005-1007Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2009.11.016
Keywords
LEIS; High sensitivity; Mass resolution; Depth resolution; Self-assembled monolayer; Quantitative
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Low-Energy Ion Scattering (LEIS or ISS) is used to selectively analyze the atomic composition of the outer atomic layer of surfaces. In addition, the spectrum gives (non-destructively) the in-depth distribution. Using a double toroidal energy analyzer with parallel energy detection and time-of-flight filtering a high sensitivity and mass resolution of LEIS is achieved. This is demonstrated for a highly dispersed catalyst of Pt/Au on gamma-alumina. The improved depth resolution is illustrated for self-assembled monolayers of alkanethiols (12-20 carbon atoms) on gold. Even for these low Z carbon atoms a clear shift of 8 eV/carbon atom is observed (using 1.5 keV (4)He(+) ion scattering). This opens many new possibilities for studies of ultra-thin diffusion barriers, high-k dielectrics and biosensors. (C) 2009 Elsevier Ltd. All rights reserved.
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