Photocatalytic properties of Au/TiO2 thin films prepared by RF magnetron co-sputtering

Au/TiO2 thin films with various Au doping contents were deposited on quartz substrates by radio frequency (RF) magnetron co-sputtering. The as-deposited Au/TiO2 films were characterized by energy-dispersive X-ray spectroscopy (EDS), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), XRD, and UV-vis techniques. An doping and UV treatment enhanced the photocatalytic efficiency of TiO2 thin films. The optimal RF power of the Au target and UV treatment time were 5 W and I h, respectively. The enhanced photoactivity of Au(5W)/TiO2 thin films with UV treatment is found to result from the increased hydroxyl concentration. (C) 2007 Elsevier Ltd. All rights reserved.