Journal
ULTRAMICROSCOPY
Volume 136, Issue -, Pages 50-60Publisher
ELSEVIER
DOI: 10.1016/j.ultramic.2013.07.018
Keywords
Strain analysis; Z-contrast; Template matching; STEM
Categories
Funding
- U.S. Army Research Office [W911NF-10-1-0524]
- Nanoscience Foundation, France
- NSF [DMR 0049790]
- Division Of Materials Research [1006077] Funding Source: National Science Foundation
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A real space approach is developed based on template matching for quantitative lattice analysis using atomic resolution Z-contrast images. The method, called TeMA, uses the template of an atomic column, or a group of atomic columns, to transform the image into a lattice of correlation peaks. This is helped by using a local intensity adjusted correlation and by the design of templates. Lattice analysis is performed on the correlation peaks. A reference lattice is used to correct for scan noise and scan distortions in the recorded images. Using these methods, we demonstrate that a precision of few picometers is achievable in lattice measurement using aberration corrected Z-contrast images. For application, we apply the methods to strain analysis of a molecular beam epitaxy (MBE) grown LaMnO3 and SrMnO3 superlattice. The results show alternating epitaxial strain inside the superlattice and its variations across interfaces at the spatial resolution of a single perovskite unit cell. Our methods are general, model free and provide high spatial resolution for lattice analysis. (C) 2013 Elsevier B.V. All rights reserved.
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