Journal
ULTRAMICROSCOPY
Volume 121, Issue -, Pages 31-37Publisher
ELSEVIER
DOI: 10.1016/j.ultramic.2012.06.012
Keywords
High-resolution transmission electron microscopy; Low acceleration voltage; Spherical aberration corrector; Information limit; Young fringe; Monochromator
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Funding
- JST
- MEXT
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We assess the imaging performance of a transmission electron microscopy (TEM) system operated at a relatively low acceleration voltage using the three-dimensional (3D) Fourier transform of through-focus images. Although a single diffractogram and the Thon diagram cannot distinguish between the linear and non-linear TEM imaging terms, the 3D Fourier transform allows us to evaluate linear imaging terms, resulting in a conclusive assessment of TEM performance. Using this method, information transfer up to 98 pm is demonstrated for an 80 kV TEM system equipped with a spherical aberration corrector and a monochromator. We also revisit the Young fringe method in the light of the 3D Fourier transform, and have found a considerable amount of non-linear terms in Young fringes at 80 kV even from a typical standard specimen, such as an amorphous Ge thin film. (C) 2012 Elsevier B.V. All rights reserved.
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