Journal
ULTRAMICROSCOPY
Volume 111, Issue 8, Pages 1206-1213Publisher
ELSEVIER
DOI: 10.1016/j.ultramic.2011.01.039
Keywords
EBSD; Cross-correlation; AFM; Indentation
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The surface morphology surrounding wedge indentations in (0 0 1) Si has been measured using electron backscattered diffraction (EBSD) and atomic force microscopy (AFM). EBSD measurement of the lattice displacement field relative to a strain-free reference location allowed the surface uplift to be measured by summation of lattice rotations about the indentation axis. AFM was used in intermittent contact mode to determine surface morphology. The height profiles across the indentations for the two techniques agreed within 1 nm. Elastic uplift theory is used to model the data. Published by Elsevier B.V.
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