Journal
ULTRAMICROSCOPY
Volume 111, Issue 6, Pages 448-457Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.ultramic.2010.11.016
Keywords
Atom probe tomography; Reconstruction; Ion projection
Categories
Funding
- University of Sydney
- European Commission [237059]
- EPSRC [EP/D077664/1]
- Engineering and Physical Sciences Research Council [EP/D077664/1] Funding Source: researchfish
- EPSRC [EP/D077664/1] Funding Source: UKRI
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Key to the integrity of atom probe microanalysis, the tomographic reconstruction is built atom by atom following a simplistic protocol established for previous generations of instruments. In this paper, after a short review of the main reconstruction protocols, we describe recent improvements originating from the use of exact formulae enabling significant reduction of spatial distortions, especially near the edges of the reconstruction. We also show how predictive values for the reconstruction parameters can be derived from electrostatic simulations, and finally introduce parameters varying throughout the analysis. (C) 2010 Elsevier BM. All rights reserved.
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