4.4 Article Proceedings Paper

Analytic derivation of optimal imaging conditions for incoherent imaging in aberration-corrected electron microscopes

Journal

ULTRAMICROSCOPY
Volume 108, Issue 11, Pages 1454-1466

Publisher

ELSEVIER
DOI: 10.1016/j.ultramic.2008.05.013

Keywords

Annular dark field; Scanning transmission electron microscope; Aberration correction; Depth sectioning; Resolution

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The optimal lens parameters for incoherent imaging using third and fifth-order aberration-corrected electron microscopes are derived analytically. We propose simple models for the point spread function (PSF) and transfer function that give analytic formulae for the lateral resolution and depth resolution. We also derive an analytic formula for the contrast transfer function (CTF) in three dimensions and show that depth sectioning has an information limit equivalent to tomography with a missing cone of 90 degrees minus the aperture angle. (C) 2008 Elsevier B.V. All rights reserved.

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