Journal
ULTRAMICROSCOPY
Volume 108, Issue 10, Pages 1371-1373Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.ultramic.2008.04.060
Keywords
lead zirconate titanate (PZT); electric force microscopy (EFM); charge storage; thin film
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Lead zirconate titanate (PZT) films have been extensively investigated for many applications: the nonvolatile memory devices based on their remarkable ferroelectric properties, the microelectromechanical system (MEMS) based on their piezoelectricity as well in sensors as in actuators. In this paper, we inject charges into PZT thin films, and then the charge storage and transportation through PZT thin films were observed by electric force microscopy (EFM). Results were studied and charging mechanisms were proposed. (c) 2008 Elsevier B.V. All rights reserved.
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